AFM

Atomic force microscopy (AFM) or scanning force microscopy (SFM) is a very-high-resolution type of scanning probe microscopy (SPM),  with demonstrated resolution on the order of fractions of a nanometer,  more than 1000 times better than the optical diffraction limit.

Atomic scanning microscopy resolution:  2 nm

Atomic scanning microscopy interval:      100nm – 150 μm